Deposition Technologies for Obtaining Thin Films with Special Properties
Keywords:
deposition method, thin layers, substrate, SEM
Abstract
The properties of metallic materials can be improved by deposition of materials. The coating has a tear strength and better hydro-abrasive corrosion. The thin layer deposition has a thickness of less than 10 micrometers.
When speaking about deposition technologies, it is not just about deposited thin layers, but the whole assembly (layer / substrate), therefore the degree of adherence and the costs of making such a substrate have to be taken into account and the whole must be much more powerful than anything taken separately.
In this paper we presented several methods of thin film deposition. We also highlighted some of the advantages and disadvantages of several deposition methods.
Downloads
Download data is not yet available.
References
[1]. G. Vermesan, E. Vermeasan, Introducere in ingineria suprafetelor (Introduction to surface engineering), Ed. Dacia ClujNapoca, 1999.
[2]. G. Subramanyam, M. W. Cole, N. X. Sun, T. S. Kalkur, N. M. Sbrockey, G. S. Tompa, X. Guo, C. Chen, S. P. Alpay, G. A. Rossetti Jr., K. Dayal, L. Q. Chen, D. G. Schlom, Challenges and opportunities for multi-functional oxide thin films for voltage tunable radio frequency/ microwave components, Journal of Applied Physics 114, 191301, 2013.
[3]. A. V. Moholkar, S. S. Shinde, A. R. Babar, Kyu-Ung Sim, H. K. Lee, K. Y. Rajpure, P. S. Patil, C. H. Bhosale, J. H. Kimb, Synthesis and characterization of Cu2ZnSnS4 thin films grown by PLD: Solar cells, Journal of Alloys and Compounds, 509, 2011.
[4]. X. Yang, L. Wei, W. Song, Z. Bi-feng, C. Zhao-hui, Microstructures and mechanical properties of CVD-SiC coated PIP-C/SiC composites under high temperatur, Surface & Coatings Technology, 209, p. 197-202, 2012.
[5]. G. Subramanyam, M. W. Cole, N. X. Sun, T. S. Kalkur, N. M. Sbrockey, G. S. Tompa, X. Guo, C. Chen, S. P. Alpay, G. A. Rossetti Jr., K. Dayal, L.Q.Chen, and D. G. Schlom, Challenges and opportunities for multi-functional oxide thin films for voltage tunable radio frequency/ microwave components, Journal of Applied Physics 114, 191301, 2013.
[6]. E. K. Nyutua, M. A. Kmetzc, S. L. Suiba, Formation of MoSi2–SiO2 coatings on molybdenum substrates by CVD/MOCVD, Surface & Coatings Technology 200, p. 3980-3986, 2006.
[7]. H. O. Pierson, Handbook of Chemical Deposition, Noyes publications, Park Ridge, NJ, 1999.
[8]. J.-K. Yoon, J.-K. Jee, J.-Y. Byun, G.-H. Kim, Y.-H. Paik, J. S. Kim, Surf. Coat. Technol., 160, 2002.
[9]. ***, http://www.sio2med.com/technology-plasmadeposition.html.
[10]. P.-H. Lei, H. M. Wu, C.-M. Hsu, Zinc oxide (ZnO) grown on flexible substrate using dual-plasma-enhanced metalorganic vapor deposition (DPEMOCVD), Surface & Coatings Technology, 206, p. 3258-3263, 2012.
[11]. I. Volintiru, M. Creatore, B. J. Kniknie, C. I. M. A. Spee, M. C. M. van de Sanden, J. Appl. Phys., 102, 043709, 2007.
[2]. G. Subramanyam, M. W. Cole, N. X. Sun, T. S. Kalkur, N. M. Sbrockey, G. S. Tompa, X. Guo, C. Chen, S. P. Alpay, G. A. Rossetti Jr., K. Dayal, L. Q. Chen, D. G. Schlom, Challenges and opportunities for multi-functional oxide thin films for voltage tunable radio frequency/ microwave components, Journal of Applied Physics 114, 191301, 2013.
[3]. A. V. Moholkar, S. S. Shinde, A. R. Babar, Kyu-Ung Sim, H. K. Lee, K. Y. Rajpure, P. S. Patil, C. H. Bhosale, J. H. Kimb, Synthesis and characterization of Cu2ZnSnS4 thin films grown by PLD: Solar cells, Journal of Alloys and Compounds, 509, 2011.
[4]. X. Yang, L. Wei, W. Song, Z. Bi-feng, C. Zhao-hui, Microstructures and mechanical properties of CVD-SiC coated PIP-C/SiC composites under high temperatur, Surface & Coatings Technology, 209, p. 197-202, 2012.
[5]. G. Subramanyam, M. W. Cole, N. X. Sun, T. S. Kalkur, N. M. Sbrockey, G. S. Tompa, X. Guo, C. Chen, S. P. Alpay, G. A. Rossetti Jr., K. Dayal, L.Q.Chen, and D. G. Schlom, Challenges and opportunities for multi-functional oxide thin films for voltage tunable radio frequency/ microwave components, Journal of Applied Physics 114, 191301, 2013.
[6]. E. K. Nyutua, M. A. Kmetzc, S. L. Suiba, Formation of MoSi2–SiO2 coatings on molybdenum substrates by CVD/MOCVD, Surface & Coatings Technology 200, p. 3980-3986, 2006.
[7]. H. O. Pierson, Handbook of Chemical Deposition, Noyes publications, Park Ridge, NJ, 1999.
[8]. J.-K. Yoon, J.-K. Jee, J.-Y. Byun, G.-H. Kim, Y.-H. Paik, J. S. Kim, Surf. Coat. Technol., 160, 2002.
[9]. ***, http://www.sio2med.com/technology-plasmadeposition.html.
[10]. P.-H. Lei, H. M. Wu, C.-M. Hsu, Zinc oxide (ZnO) grown on flexible substrate using dual-plasma-enhanced metalorganic vapor deposition (DPEMOCVD), Surface & Coatings Technology, 206, p. 3258-3263, 2012.
[11]. I. Volintiru, M. Creatore, B. J. Kniknie, C. I. M. A. Spee, M. C. M. van de Sanden, J. Appl. Phys., 102, 043709, 2007.
Published
2015-09-15
How to Cite
1.
ȚUGUI C-A, VIZUREANU P, NEJNERU C, PERJU M-C, AXINTE M, BĂLŢATU S-M. Deposition Technologies for Obtaining Thin Films with Special Properties. The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science [Internet]. 15Sep.2015 [cited 24Dec.2024];38(3):58-2. Available from: https://gup.ugal.ro/ugaljournals/index.php/mms/article/view/1306
Issue
Section
Articles
