[1]
E. E. VALCU (HERBEI), V. MUSAT, und T. LEEDHAM, Thermal Decomposition of Hafnium Ethoxide-Mollecular Precursor for Hafnia Dielectric Thin Films, The Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science, Bd. 35, Nr. 3, S. 73-77, Sep. 2012.